锗Ge单晶参数
| 生长方法/Growth Method | VGF | |
| 掺杂类型/Dopant | P型:镓/p-type:Ga | N型:砷/n-type:As |
| 晶片型状/Wafer Shape | 圆形(尺寸2"、3"、4"、6”)/Round(DIA2"、3、4"、6") | |
| 晶向/Surface Orientation | (100)±0.5°(111)±0.5° | |
其他晶向要求可根据客户需求加工/*Other Orientations maybe available upon request | ||
| 电阻率/Resistivity (Q.cm) | 根据客户要求/As Required | |
位错/Etch Pitch Density (cm2) | ≤5000,≤500 | |
| 厚度/Thickness (um) | 175或500+25 或根据客户要求 | |
| 总厚度变化/TTV[P/P](um) | ≤10 | |
| 翘曲/WARP(um ) | ≤15 | |
| 参考边/OFF(mm) | 32.5±1 | |
| If needed by customer根据客户需要 | ||
主面抛光/Surface | E/E, P/E, P/G | |