Material property
| Materials | 3“4”6“LiO3Ta(Acoustic/Optical grade) |
| Cut | X112°/Y28°/Y36°/Y42°/YZ Angle cutting can be customized |
Curie temperature | 605°C±3°C |
| Adulterate | Fe |
Processing capacity
| Surface treatment | Surface polishing/Double-sided polishing Single-sided grinding Double-sided grinding | |
| thickness | 0.18/0.25/0.35/0.50/1.00 + mm / 0.25/0.35/0.50/1.00+mm | |
| TTV | < 1~5µm | |
| BOW | ± (25µm ~40um ) | |
| Warp | <= 35µm | |
| LTV（5mm×5mm） | <1.5 um | |
| PLTV（<0.5um） | ≥98% (5mm*5mm) Edge 2mm excepted | |
| edge | Conform to SEMI M1.2@with GC800# .regular at C typed | |
| Directional platform | Customize on request | |
| Polished surface | Roughness Ra≤5A | |
| Reverse side | Roughness Ra:0.5-1.0µm GC#1000 | |
| chamfer | Conform to SEMI M1.2 Standard/refer to IEC62276 | |
| Cracks, saw marks, stains | NO | |